Improved micropositioning of 2 DOF stage by using the neural network compensation of plant nonlinearities /
This paper describes the system for micropositioning of a 2 DOF mechanism with piezoelectric actuators (PEAs), which is called a piezo actuated stage (PAS). The PAS is fabricated by a photo structuring process from photosensitive glass and PEAs are built-on to meet the request for its precisemovemen...
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| Main Authors: | , , |
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| Format: | Book Chapter |
| Jezik: | English |
| Teme: | |
| Sorodne knjige/članki: | Vsebovano v:
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