Polynomial control technique for adaptive positioning within sub-micrometer scale
This paper describes an experimental approach to the positioning of a MEMS production system with a nano - scale resolution. Presented production system works on the basis of friction based piezo electric motors, which are being very hard for modeling. It is even being hard to describe this motors u...
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| Format: | Book Chapter |
| Jezik: | English |
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RAAD 2010 |
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| LEADER | 01766naa a2200253 ib4500 | ||
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| 001 | 14220566 | ||
| 003 | SI-MaCOB | ||
| 005 | 20100712000000.0 | ||
| 008 | 100712s2010 xxu||||fs|||||||| ||eng c | ||
| 040 | |a KTFMB |b slv |c SI-MaIIZ |e ppiak | ||
| 041 | 0 | |a eng |b eng | |
| 080 | |a 007.52 | ||
| 100 | 1 | |a Škorc, Gregor. |4 aut | |
| 245 | 0 | 0 | |a Polynomial control technique for adaptive positioning within sub-micrometer scale |h [Elektronski vir] / |c G. Škorc, R. Šafarič and A. Rojko. |
| 256 | |a Besedilni in slikovni podatki. | ||
| 300 | |a Str. 131-136 : |b Ilustr. | ||
| 504 | |a Bibliografija: str. 136. | ||
| 504 | |a Abstract. | ||
| 520 | |a This paper describes an experimental approach to the positioning of a MEMS production system with a nano - scale resolution. Presented production system works on the basis of friction based piezo electric motors, which are being very hard for modeling. It is even being hard to describe this motors using classical mathematical functions, or to define them using other well known control procedures. Sophisticated control techniques are often required for successful positioning of such systems. In our work we present a simple control technique based on experimental results and polynomial equations. Presented polynomial control technique fulfils demands for positioning in sub-micrometer scale. Theory and practical results of proposed control technique are given within this paper. | ||
| 653 | 0 | |a robotske operacije |a algoritmi | |
| 653 | 0 | |a hybrid system |a robot operation |a algorithms | |
| 700 | 1 | 2 | |a Šafarič, Riko. |4 aut |
| 700 | 1 | 2 | |a Rojko, Andreja. |4 aut |
| 773 | 0 | |a International Workshop on Robotics in Alpe-Adria-Danube Region (19 : 2010 : Budapest) |t RAAD 2010 |d [Piscataway] : IEEE, cop. 2010 |w 7756628 |z 9781424468843 |g Str. 131-136 | |