Polynomial control technique for adaptive positioning within sub-micrometer scale
This paper describes an experimental approach to the positioning of a MEMS production system with a nano - scale resolution. Presented production system works on the basis of friction based piezo electric motors, which are being very hard for modeling. It is even being hard to describe this motors u...
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Main Authors: | Škorc, Gregor. (Author), Šafarič, Riko. (Author), Rojko, Andreja. (Author) |
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Format: | Book Chapter |
Jezik: | English |
Teme: | |
Sorodne knjige/članki: | Vsebovano v:
RAAD 2010 |
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